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Ultraviolet nanoimprint lithography: Fabrication of ordered nanostructures, integrated optics and electronic devices
by Elisabeth Lausecker
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Nanoimprint lithography (NIL) is a lithographic technique that allows the patterning of substrates with nanostructures over large areas with high density. NIL relies on the simplicity of mechanically
Details:
Amazon rank: #7,527,428
Price: $87.42
bound: 276 pages
Publisher: Südwestdeutscher Verlag für Hochschulschriften (September 12, 2012)
Language: English
ISBN-10: 3838130804
ISBN-13: 978-3838130804
Weight: 13.4 ounces
Ultraviolet nanoimprint lithography: Fabrication of ordered nanostructures, integrated optics and electronic devices Elisabeth Lausecker
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