EUV Lithography (SPIE Press Monograph Vol. PM178SC) Book Pdf

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EUV Lithography (SPIE Press Monograph Vol. PM178SC)

by Vivek Bakshi

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Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been m

 

 

Details:

Amazon rank: #5,531,161
Price: $113.00
bound: 702 pages
Publisher: SPIE--The International Society for Optical Engineering (December 11, 2008)
Language: English
ISBN-10: 0819496405
ISBN-13: 978-0819496409
Weight: 2.4 pounds

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

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