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Tutorial approach. The book emphasizes the design and analysis through ove
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If you are serious about learning MEMS and microsystems, I recommend the following MEMS books: An Introduction to Microelectromechanical ... Microelectromechanical systems (MEMS, also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and … Recommended MEMS books 83fc8d264e
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